Collection: Ion Source

Scion plasma's ion sources series is a revolutionary product that can be used to enhance magnetron sputtering, PECVD, and surface treatment. The ion sources are developed based on a comprehensive plasma simulation using the Scion plasma’s proprietary software ASTRA.

The ion energy distribution of the ion source during operation exhibits a single narrow peak, thereby achieving optimal energy transfer to the atoms on the deposited surface.This unique characteristic, which is a revolutionary breakthrough, allows the growth of thin films with randomly oriented and preferentially oriented polycrystalline microstructure at room temperature, which is particularly attractive for coating heat-sensitive materials. When combined with a magnetron sputtering cathodes (click here to know more about Scion Plasma's magnetron sputtering cathodes), the ion source enables a new soft-sputtering mode that features low sputtering voltage and high current, which not only leads to ~30% increase in the deposition rates but also greatly reduces damage to delicate film surfaces.

We offer a variety of ion source types, including circular and linear, as well as combination kits, to meet different application requirements. Typical applications include low-E coatings, high-rate deposition of moisture barrier coatings, optical coatings, functional coatings, hard coatings, and surface cleaning.