Collection: Magnetron Sputtering Cathodes

Magnetron sputtering cathodes designed and manufactured by Scion Plasma are suitable for research and development applications. This series of products is designed and optimized using Scion Plasma's proprietary plasma simulation software ASTRA, achieving a unique low-voltage, high-current discharge mode that improves deposition rates and reduces damage to delicate thin films and substrates.

When the magnetron sputtering cathodes used with Scion Plasma's ion sources (click here to know more about Scion Plasma's Ion source),  they can enable a new soft-sputtering mode that features low sputtering voltage and high current, which not only leads to ~30% increase in the deposition rates but also greatly reduces damage to delicate film surfaces.