Accessories
Scion Plasma provides accessories like flanges, power supplies, filters for use with ion source and magnetron sputtering cathodes. Specifications and drawings can be found on the designated pages.
Flanges
QF (KF) HV Flanges
Scion Plasma offers ISO-approved QF (KF) vacuum flanges in materials including 304L stainless steel, 6061 aluminum, and brass.
Flanges
ISO HV Flanges
ISO-K and ISO-F are two common high-vacuum flange types, differing primarily in their fixing methods. ISO-K utilizes a snap-on fixing system, with flange claws and a sealing ring creating a seal. ISO-F utilizes bolted fixing, tightly connecting the flange to the retaining ring, sealing ring, and other components.
Power Supply
RC-DC Filter Box
Scion Plasma’s DC-RF filters are designed and engineered for combining DC and RF powers to excite plasma.