Accessories
Scion Plasma provides accessories like flanges, power supplies, filters for use with ion source and magnetron sputtering cathodes. Specifications and drawings can be found on the designated pages.
Please contact us if you need more technical support,
Email: info@scionplasma.com
Tel: +1 734-709-5196
Address: 4942 Dawn Ave. Ste 118, East Lansing, MI 48823, USA.
Power Supply
DC-RF Filter Box
Scion Plasma’s DC-RF filters are designed and engineered for combining DC and RF powers to excite plasma.
Flanges
Flange Adapters for Ion Source Installation
The flange adapters are used for installing the SPR-100 ion source and circular sputtering magnetrons to vacuum systems.