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Scion Plasma's core product lineup features patented ion sources including round and linear shapes, high-efficiency magnetron sputtering cathodes, and a comprehensive range of professional related accessories.

Ion source

Ion Source

Patented ion sources series is a revolutionary product that can be used to enhance magnetron sputtering, PECVD, and surface treatment. It leads to ~30% increase in the deposition rates but also greatly reduces damage to delicate film surfaces.

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Magnetron Sputtering Cathodes SMC

Magnetron Sputtering Cathodes

Magnetron sputtering cathodes designed and manufactured by Scion Plasma are suitable for research and development applications.
When used with Scion Plasma's ion sources，magnetron sputtering cathodes leads to ~30% increase in the deposition rates but also greatly reduces damage to delicate film surfaces.

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Filter Flanges

Accessories

Scion Plasma provides accessories like flanges, power supplies, filters for use with ion source and magnetron sputtering cathodes.

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