Example Applications & Results

The examples shown here represent selected, tested, and published applications. They demonstrate how our ion source technology improves film quality, enhances process efficiency, and enables new capabilities across a wide range of materials and operating conditions.

Our ion sources are highly adaptable and can be configured for both experimental and industrial use. Customers are encouraged to explore additional applications based on their specific requirements. If your process has unique challenges, we welcome the opportunity to discuss how our technology can support your goals.

 

High-Rate Deposition of Nb₂O₅ Thin Films with Improved Film Quality

Using Scion Plasma’s broad-beam ion source in MetaMode deposition enables:

  • >3× higher deposition rates compared to conventional reactive sputtering
  • Reduced oxygen requirements (from >20% down to ~7.5%)
  • Enhanced film quality, including:
    • Smoother surfaces
    • Higher optical transmittance
    • Denser film structure

The ion source also helps eliminate process limitations such as the disappearing anode effect, improving stability and reproducibility.

🔗 Publication: https://doi.org/10.1016/j.jallcom.2025.184505

 

Room-Temperature Growth of Highly Oriented AlN Thin Films

Our ion source enables high-quality aluminum nitride (AlN) film growth at room temperature, overcoming a major limitation of conventional sputtering.

Key benefits include:

  • Strong (0002) crystal orientation without high-temperature processing
  • Reduced surface roughness (down to ~0.95 nm)
  • Enhanced piezoelectric performance (up to ~6.06 pm/V)
  • Improved crystallinity through precise control of ion energy and flux

🔗 Publication: https://doi.org/10.1021/acsami.5c13449

 

Enhanced Low-E Coatings with Thinner Silver Layers

For energy-efficient window coatings, our ion source improves performance in Nb₂O₅/Ag/Nb₂O₅ low-emissivity (low-E) multilayer stacks.

Key advantages:

  • Continuous Ag films at just 6 nm thickness
    (vs. ~12 nm without ion assistance)
  • Higher visible light transmission
  • Improved infrared (IR) reflectance for better thermal insulation
  • More uniform and controlled film microstructure

🔗 Publication: https://doi.org/10.1016/j.ceramint.2026.03.159