Magnetron Sputtering Cathodes

Scion Plasma’s SMC series sputtering magnetrons are suitable for R&D applications. They can be used for 2”, 3”, and 4” targets of 1/8” to 1/4” thickness. The magnetron designs are optimized using the company’s proprietary plasma simulation software ASTRA, enabling a unique low-voltage and high-current discharge mode, which results in increased deposition rates and reduced damage to delicate films and substrates. The SMC series sputtering magnetrons are suitable for sputtering all types of non-magnetic materials.

Magnetron Sputtering Cathodes

SMC Series

SMC series sputtering magnetrons can be used for 2”, 3”, and 4” targets of 1/8” to 1/4” thickness.

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