Magnetron Sputtering Cathodes
Scion Plasma’s SMC series sputtering magnetrons are suitable for R&D applications. They can be used for 2”, 3”, and 4” targets of 1/8” to 1/4” thickness. The magnetron designs are optimized using the company’s proprietary plasma simulation software ASTRA, enabling a unique low-voltage and high-current discharge mode, which results in increased deposition rates and reduced damage to delicate films and substrates. The SMC series sputtering magnetrons are suitable for sputtering all types of non-magnetic materials.
Magnetron Sputtering Cathodes
SMC Series
SMC series sputtering magnetrons can be used for 2”, 3”, and 4” targets of 1/8” to 1/4” thickness.